首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
曝光方法
摘要
提供一种曝光方法,可以所希望的状态进行液体的供给及回收,且可抑制投影至基板上的图案像的劣化。曝光装置具备喷嘴构件(70),及防振机构(60)。喷嘴构件(70)具有供给液体(LQ)的供给口(12)与回收液体(LQ)的回收口(22)。防振机构(60)是相对于主柱(1)的下侧段部(7)防振支撑着喷嘴构件(70)。
申请公布号
TW200921762
申请公布日期
2009.05.16
申请号
TW097127865
申请日期
2005.03.23
申请人
尼康股份有限公司
发明人
原英明
分类号
H01L21/027(2006.01);G03F7/20(2006.01);G03B27/42(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
詹铭文;萧锡清
主权项
地址
日本
您可能感兴趣的专利
DRIVING OPERATION DEVICE OF FISHING NET REPAIRING MACHINE
POLISHING GLOVE AND MANUFACTURE THEREOF
CORING METHOD FOR WIRE-CUT ELECTRO-DISCHARGE MACHINING UNIT
WATER-SOLUBLE DIELECTRIC FLUID FOR ELECTRIC DISCHARGE MACHINE
SISTEMA ELECTRONICO PARA CONMUTACION DE PAQUETES
OXIDATION OF METHANE OVER HETEROGENEOUS CATALYSTS
Thermoplastic resin composition
SHUNT CONNECTING APPARATUS
Nonvolatile semiconductor memory device with a double gate structure
COPOLYMER LATEX IMPREGNATED NON-WOVEN WEB OF FIBERS
USE OF LASERS TO BREAK DOWN OBJECTS FOR REMOVAL FROM WITHIN THE BODY
EXTRUDED CLOSED CELL THERMOPLASTIC FOAM
AMPHIPHILIC POLYIMIDE PRECURSOR AND PROCESS FOR PREPARING THE SAME
METHOD FOR BUS ACCESS FOR DATA TRANSMISSION THROUGH A MULTIPROCESSOR BUS
INK FOR ERASABLE SCRIPT
METHOD AND MEANS FOR PARKING READ/WRITE HEADS IN A DISC DRIVE USING THE BACK- EMF OF THE SPINDLE MOTOR TO OPERATE A STEPPER MOTOR
SECURITY TAG DEACTIVATION SYSTEM
SHIELDED ELECTRICAL CONNECTOR
NOTCH FILTER FOR AN INTERPOLATOR/DECIMATOR FILTER STRUCTURE
DEFLECTION DISTORTION CORRECTION DEVICE