发明名称 METALL-ISOLATOR-METALL-KONDENSATOR UND VERFAHREN ZU SEINER HERSTELLUNG
摘要 <p>The integrated component has a number of conductor paths (13) and a capacitor (12) with a dielectric layer (5) between 2 electrode layers (14,15), which together are provided using the same sequence of metallisation layers (3,4,7-11) as that for the adjacent conductor path. The capacitor electrode layers may each be coupled to an underlying or overlying metal conductor path layer via a perpendicular connection (2,16), e.g. formed in an underlying intermediate dielectric layer (1).</p>
申请公布号 AT430380(T) 申请公布日期 2009.05.15
申请号 AT20010913848T 申请日期 2001.03.06
申请人 INFINEON TECHNOLOGIES AG 发明人 LACHNER, RUDOLF;SCHWERD, MARKUS;SCHRENK, MICHAEL
分类号 H01G4/33;H01L29/92;H01L21/02;H01L23/522 主分类号 H01G4/33
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