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发明名称
METHOD AND APPARATUS FOR FLATTENING FLEXIBLE SUBSTRATE
摘要
申请公布号
KR20090048739(A)
申请公布日期
2009.05.15
申请号
KR20070114751
申请日期
2007.11.12
申请人
IAMTEN CO., LTD.
发明人
SEO, MAN SEUNG;KIM, HAE RYUNG
分类号
H01L21/02;H01L21/00
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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