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发明名称
POLISHING AGENT FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, POLISHING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
KR20090049067(A)
申请公布日期
2009.05.15
申请号
KR20097005039
申请日期
2009.03.11
申请人
ASAHI GLASS COMPANY LTD.
发明人
KON YOSHINORI;YOSHIDA IORI;NAKAZAWA NORIHITO
分类号
C09K3/14;B24B37/04;H01L21/304
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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