| 摘要 |
Disclosed is a substrate processing system 100 with a magnetic conduit 118 configuration to improve the movement of a substrate carrier 104 within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor 110, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier. |
