| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump TP attaining optimization of the feed amount of cooling water and contributing to energy-saving. SOLUTION: A flow temperature sensitive valve V having an opening varied by a temperature is closely installed on a turbo-molecular pump TP in series to a pipe 8 for feeding cooling water CW to the turbo-molecular pump TP. A wax WX having large coefficient of linear expansion is filled in a housing 11 of the flow temperature sensitive valve V, and opening/closing of a flow passage 12 is performed utilizing thermal expansion of the wax WX. A valve element 14 positioned at the inside of the flow temperature sensitive valve V is slidable and is downwardly urged, however, urging force by an enlargement/contraction body 20 filled with the wax WX is generated by an expansion amount of the wax WX corresponding to the temperature of the turbo-molecular pump TP. A restriction pin 21 is provided on the housing 11, and when the temperature of the turbo-molecular pump TP is descended and the wax WX is contracted, urging is restricted such that the valve element 14 does not completely close the flow passage 12 and a flow rate of the minimum amount is maintained when the valve element 14 is downwardly pushed by a spring 15. COPYRIGHT: (C)2009,JPO&INPIT
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