| 摘要 |
An apparatus for measuring a shape profile of a surface of a sheet of material includes a light source for providing a light beam to be directed at the surface of the sheet of material, a linear translation stage coupled to the light source for translating the light source over the surface of the sheet of material such that the light beam, when directed at the surface, is incident on the surface at multiple positions and produces a reflected light beam at each of the multiple positions, a plurality of light receivers located at predetermined positions for selectively intercepting the reflected light beam produced at each of the multiple positions, a data acquisition device configured to receive information related to position difference between the light source and a selected one of the plurality of light receivers intercepting the reflected light beam produced at each of the multiple positions, and a data analysis device configured to correlate the position difference information to a shape profile of the surface of the sheet of material.
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