发明名称 INORGANIC POROUS MATERIAL FOR BREAKING REDUCED PRESSURE
摘要 PROBLEM TO BE SOLVED: To provide a plate-like inorganic porous material for breaking the reduced pressure using a gas-permeable porous material by which sufficient pressure variation buffer effect can be achieved and which is capable of suppressing the blowing-up of particles. SOLUTION: The inorganic porous material F for breaking the reduced pressure, having a three-dimensional network skeleton structure in which many adjacent spherical pores are communicated with each other through communication holes, characterized in that it is composed of a plate having a porosity of 55 to 65%, an average pore diameter of 30 to 90μm, as measured with a mercury porosimeter, and a diameter of the communication hole 2 of 10 to 20μm. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009102191(A) 申请公布日期 2009.05.14
申请号 JP20070274961 申请日期 2007.10.23
申请人 COVALENT MATERIALS CORP 发明人 SAITO NORIHIKO;TAKEDA SOTARO;IWASAKI TAKESHI;FUKUOKA SEIICHI;ANDO MASAHIRO;ARAI ATSUSHI;HYODO TOSHIHIKO
分类号 C04B38/02;C04B38/00;C04B38/10;H01L21/3065 主分类号 C04B38/02
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