摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric body film containing no lead, high in the Curie temperature, and having an excellent piezoelectric characteristic, and also to provide a piezoelectric element. <P>SOLUTION: This method of manufacturing a piezoelectric body film includes processes of: preparing a sol-like precursor solution containing Bi, Ti, Ba, Sr and Nd; preparing particles each formed of a substance represented by a general formula: Bi<SB>4-x</SB>Nd<SB>x</SB>Ti<SB>3</SB>O<SB>12</SB>-(Ba<SB>1-y</SB>Sr<SB>y</SB>)Bi<SB>4</SB>Ti<SB>4</SB>O<SB>15</SB>, wherein x is a number of 0.1-1.5, and y is a number of 0.2-0.8; preparing paste containing the particles; preparing mixture paste by mixing the paste with the sol-like precursor solution; and applying the mixture paste and thereafter drying and baking it. <P>COPYRIGHT: (C)2009,JPO&INPIT |