| 摘要 |
PROBLEM TO BE SOLVED: To provide an PIN type detector capable of successfully detecting an electromagnetic wave or charged particles without degrading sensitivity, and provide a charged particle beam device provided with the PIN type detector. SOLUTION: The PIN type detector detects the electromagnetic wave or charged particles generated from a sample. A light receiving surface opposite to the sample is a P-type or an N-type semiconductor, and the N-type semiconductor or the P-type semiconductor on a rear surface opposite to the light receiving surface is divided to extract a signal from the rear surface. COPYRIGHT: (C)2009,JPO&INPIT |
