| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic circuit for generating a magnetic field to set the direction of a magnetic field to be applied on soft and hard magnetic films formed on a ring substrate more completely parallel to the radial direction of the ring substrate. SOLUTION: The magnetic circuit for generating a radial-direction magnetic field includes first and second permanent magnet units, and a ring substrate to be processed arranged in a space between the first and second permanent magnets, and generates a magnetic field in the radial direction in a plane including the ring substrate when arranging the ring substrate. The first and second permanent magnetic units have magnetic directions and shapes symmetrical with respect to the arranged surface and are arranged in symmetric positions, and have inner diameters smaller than an outer diameter of the substrate which is to be processed. The outer diameter is set greater than the inner diameter of the substrate which is to be processed. The permanent magnet units have magnetization components in a direction parallel to the radial direction of the substrate. COPYRIGHT: (C)2009,JPO&INPIT
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