| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon manufacturing apparatus capable of simplifying the whole apparatus and manufacturing silicon at a low cost. SOLUTION: The silicon manufacturing apparatus includes a reaction tube 10, a heating furnace 20 for heating the reaction tube 10, a zinc supply pipe 30 for supplying zinc to the reaction tube 10, a zinc charging part 40 for charging zinc into the zinc supply pipe 30, and a silicon compound supply pipe 50 for supplying a silicon compound into the reaction tube 10, wherein a connection part 30b of the zinc supply pipe 30 and a heating part 30a are provided in a heating region (α) of the heating furnace 20. COPYRIGHT: (C)2009,JPO&INPIT
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