| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone generating device in which highly efficient ozone generation is realized by suppressing the thermal decomposition of ozone and a simple and inexpensive structure is realized. SOLUTION: The ozone generating device generates ozone by generating silent discharge in a source gas containing oxygen. The ozone generating device comprises a tubular high voltage electrode 1, a dielectric tube 2 arranged via a discharge space 4 at the coaxial peripheral part of the tubular high voltage electrode 1, and a conductive refrigerant 10 for cooling the dielectric tube 2. The conductive refrigerant 10 is electrically grounded. COPYRIGHT: (C)2009,JPO&INPIT
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