| 发明名称 |
SYSTEM FOR PREVENTING CONTAMINANTS FROM REACHING A GAS PURIFIER |
| 摘要 |
The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.
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| 申请公布号 |
US2009120294(A1) |
申请公布日期 |
2009.05.14 |
| 申请号 |
US20080263763 |
申请日期 |
2008.11.03 |
| 申请人 |
SCHULTE THOMAS ROBERT;HAWKE MICHAEL HENRY;PACE KEITH RANDALL;BERGMAN JR THOMAS JOHN;WARRICK BRIAN DONALD;DI SANTO SANDRO;BOYER RICK |
发明人 |
SCHULTE THOMAS ROBERT;HAWKE MICHAEL HENRY;PACE KEITH RANDALL;BERGMAN, JR. THOMAS JOHN;WARRICK BRIAN DONALD;DI SANTO SANDRO;BOYER RICK |
| 分类号 |
B01D53/30;B01D50/00;F25J3/04 |
主分类号 |
B01D53/30 |
| 代理机构 |
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