REMOVABLE COVER FOR PROTECTING RETICLE, SYSTEM INCLUDING THE COVER, AND METHOD OF USING THE COVER

摘要

PROBLEM TO BE SOLVED: To provide a removable cover for protecting a reticle used in a lithography system.

SOLUTION: The removable cover includes a frame and a membrane supported by the frame. The membrane is transparent to an inspection wavelength such that the reticle can be inspected with the removable cover in place. This removable cover protects the reticle when the removable cover is in place and is removable for lithographic exposure. The removable cover can further include at least one reticle fastener. At least the one fastener applies force to the reticle thereby preventing movement of the removable cover relative to the reticle when the removable cover is in place.

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