| 摘要 |
A method of manufacturing a semiconductor package, including at least a step A that forms a first transforming portion by irradiating a laser beam on at least a portion of a first substrate; a step B that joins together the first substrate and a second substrate in which a functional element is disposed; a step C that removes the first transforming portion that is disposed on the first substrate by etching; and a step D that forms a conductive portion in the first substrate by filling a conductive material in a portion where the first transforming portion has been removed.
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