发明名称 ELECTRODE AND ARRANGEMENT WITH MOVABLE SHIELD
摘要 The present invention comprises an electrode arrangement for a coating device with a stationary first electrode (3) and a second movable electrode (18), whose principle surfaces are opposing each other during coating, wherein the second electrode (18) may be moved along a plane parallel to the opposing principle surfaces, wherein at least one end face of an electrode running transversely to the principal surface an electrical shield (12, 19, 13) is provided, which extends at least partially parallel to the end face of one electrode, wherein at least one part (14) of the shield is formed so as to be movable.
申请公布号 US2009121604(A1) 申请公布日期 2009.05.14
申请号 US20070937137 申请日期 2007.11.08
申请人 APPLIED MATERIALS, INC. 发明人 STAHR FRANK;STEPHAN ULF;STEINKE OLAFF;SCHADE KLAUS
分类号 H01J21/22 主分类号 H01J21/22
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