| 摘要 |
An aligning apparatus and the like are provided which can improve stage alignment accuracy during stage acceleration and suppress the generation of internal vibration of the stage to improve throughput. An aligning apparatus including a table part (43) with an aligning target object (W) placed thereon and movable at least in a uniaxial direction, a driving part that applies a driving force (F) to the table part (43) in the uniaxial direction, and a position measuring part (48) that measures a position in the uniaxial direction of the table part, wherein the table part (43) comprises actuators (96, 97), provided at one or more among somewhere between two points, one being a point of application of force (91) at which the driving force (F) is applied and the other being an aligning target point (92) upon which the aligning target object W is placed, somewhere between two points, one being a point to be measured (93) by the position measuring part and the other being the aligning target point (92), and somewhere between two points, one being the point of application of force (91) and the other being the measured point (93), to maintain relative positions between the respective two points substantially constant.
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