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发明名称
Beleuchtungssystem und Abtastbelichtungsapparat unter Verwendung desselben
摘要
申请公布号
DE60138157(D1)
申请公布日期
2009.05.14
申请号
DE20016038157
申请日期
2001.06.14
申请人
CANON K.K.
发明人
SUZUKI, AKIYOSHI
分类号
G02B27/00;G02B5/32;G02B26/10;G02B27/09;G02B27/18;G02B27/20;G03F7/20;G03F7/22;H01L21/027
主分类号
G02B27/00
代理机构
代理人
主权项
地址
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