| 摘要 |
PROBLEM TO BE SOLVED: To provide an EL element in which even when a luminous layer having a property to sublimate at an annealing temperature by irradiation of laser beams is used, emission luminance is improved by carrying out an efficient annealing treatment while suppressing an effect by sublimation of its sublimable luminous layer. SOLUTION: In a manufacturing method of the EL element, a first electrode 2, a first insulating layer 3, a luminous layer 4, a second insulating layer 5, and a second electrode 6 are formed in order on an insulating substrate 1, and by irradiating laser beams on the luminous layer 4, the emission luminance is improved. The luminous layer 4 comprises a first luminous layer 4a having a property to sublimate by the annealing temperature when the laser beams are directly irradiated and a second luminous layer 4b having the property not to sublimate at the annealing temperature, and they are formed respectively so that the first luminous layer 4a may be on the lower side and the second luminous layer 4b on the upper layer side. Then, before the second insulating layer is formed, laser beams are directly irradiated on the second luminous layer 4b to perform the annealing treatment. COPYRIGHT: (C)2009,JPO&INPIT
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