发明名称 Method and Apparatus for Simultaneous Detection and Measurement of Charged Particles at One or More Levels of Particle Flux for Analysis of Same
摘要 A charged particle detector and method are disclosed providing for simultaneous detection and measurement of charged particles at one or more levels of particle flux in a measurement cycle. The detector provides multiple and independently selectable levels of integration and/or gain in a fully addressable readout manner.
申请公布号 US2009121151(A1) 申请公布日期 2009.05.14
申请号 US20090357074 申请日期 2009.01.21
申请人 发明人 DENTON M. BONNER;SPERLINE ROGER;KOPPENAAL DAVID W.;BARINAGA CHARLES J.;HIEFTJE GARY;BARNES, IV JAMES H.;ATLAS EUGENE
分类号 H01J3/14 主分类号 H01J3/14
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