发明名称 Wafer and a Method of Dicing a Wafer
摘要 A wafer includes a plurality of chips, each of the chips being spaced from each other by kerf-line regions including a reduced width.
申请公布号 US2009121321(A1) 申请公布日期 2009.05.14
申请号 US20070938585 申请日期 2007.11.12
申请人 发明人 MICCOLI GIUSEPPE;JAYACHANDRAN BHASKARAN;STEFFEN FRIEDRICH;VATER ALFRED
分类号 H01L21/78;H01L23/58;H01L27/118 主分类号 H01L21/78
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