发明名称 |
METHOD OF MANUFACTURING SILICON NANOTUBES USING DOUGHNUT-SHAPED CATALYTIC METAL LAYER |
摘要 |
Provided is a method of manufacturing silicon nanotubes including forming non-catalytic metal islands on a substrate; forming catalyst metal doughnuts to surround the non-catalytic metal islands; and growing silicon nanotubes on the catalyst metal doughnuts. The silicon nanotubes are efficiently grown using the catalyst metal doughnuts.
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申请公布号 |
US2009123649(A1) |
申请公布日期 |
2009.05.14 |
申请号 |
US20060304739 |
申请日期 |
2006.12.08 |
申请人 |
TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
PARK RAE-MAN;SANG-HYOOB KIM;MAENG SUNGLYUL;PARK JONGHYURK |
分类号 |
C23C16/24 |
主分类号 |
C23C16/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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