METHOD AND SYSTEM FOR OBTAINING BOUNDS ON PROCESS PARAMETERS FOR OPC-VERIFICATION
摘要
<p>Embodiments of the present invention provide a method of performing printability verification of a mask layout. The method includes creating one or more tight clusters; computing a set of process parameters associated with a point on said mask; comparing said set of process parameters to said one or more tight clusters; and reporting an error when at least one of said process parameters is away from said one or more tight clusters.</p>
申请公布号
WO2009061527(A1)
申请公布日期
2009.05.14
申请号
WO2008US61196
申请日期
2008.04.23
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;MUKHERJEE, MAHARAJ;GRAUR, IOANA, C.;ROSENBLUTH, ALAN, E.
发明人
MUKHERJEE, MAHARAJ;GRAUR, IOANA, C.;ROSENBLUTH, ALAN, E.