| 摘要 |
PROBLEM TO BE SOLVED: To freely change the number, position, interval or the like of scanning points which are scanned simultaneously, without light quantity loss for not only reducing the image acquisition time, but also flexibly performing observation, according to the purpose. SOLUTION: The scanning laser microscope 1 includes a laser light source 2, an acousto-optical deflector 3, arranged in an optical path of a laser beam emitted from the laser light source 2 and capable of changing the traveling direction of the laser beam when a frequency of vibration applied to a crystal is changed; frequency control units 17 and 18 for simultaneously applying vibrations, having a plurality of frequencies to the crystal of the acousto-optical deflector 3; an objective lens 5 converging laser beams emitted from the laser light source 2, to form a beam spot on a specimen A; and an optical scanning means 4 two-dimensionally scanning the scanning spot formed of the beam spot on the specimen A, by deflecting the laser beams from the laser light source 2 in two directions perpendicular to each other. The acousto-optical deflector 3, the optical scanning means 4, and a pupil 20 of the objective lens 5 are arranged, at positions which are optically conjugate with each other. COPYRIGHT: (C)2009,JPO&INPIT
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