发明名称 METHOD FOR PRODUCING FIBER-REINFORCED COMPOSITE MATERIAL
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a fiber-reinforced composite material film which can be formed at low temperatures, and in which reaction between a film forming material and a fiber material can be suppressed. SOLUTION: A substrate 33 whose surface is fixed with a fiber material is arranged at a film formation chamber 30. Besides, film formation material particles are produced by the heating of an evaporation source 15 of a film forming material in an inert gas atmosphere. Next, the film forming material particles are transferred, are put on the air flow of a supersonic free jet J, are jetted into the vacuum chamber (30), and are physically vapor-deposited on the substrate 33 fixed with the fiber material to form a fiber-reinforced composite material film in which the fiber material is involved inside the film composed of the film forming material. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009102712(A) 申请公布日期 2009.05.14
申请号 JP20070276906 申请日期 2007.10.24
申请人 TAMA TLO KK 发明人 YUMOTO ATSUSHI;NIWA NAOKI;HIROKI FUJIO
分类号 C23C14/00 主分类号 C23C14/00
代理机构 代理人
主权项
地址