发明名称 |
MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION |
摘要 |
A microelectromechanical (MEMS) device (800) comprises a substrate (20) having a top surface (88), a movable element (810) over the substrate (20), and an actuation electrode (82). The movable element (810) comprises a deformable layer (34) and a reflective element (814) mechanically coupled to the deformable layer (34). The reflective element (814) includes a reflective surface (92). The actuation electrode (82) is disposed laterally from the reflective surface (92). The movable element (810) is responsive to a voltage difference applied between the actuation electrode (82) and the movable element (810) by moving in a direction generally perpendicular to the top surface (88) of the substrate (20). |
申请公布号 |
WO2009006118(A3) |
申请公布日期 |
2009.05.14 |
申请号 |
WO2008US68061 |
申请日期 |
2008.06.24 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC.;ENDISCH, DENIS;MIGNARD, MARC |
发明人 |
ENDISCH, DENIS;MIGNARD, MARC |
分类号 |
G02B26/00;B81B3/00 |
主分类号 |
G02B26/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|