| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storing container preventing moisture from intruding into a communication part making inside and outside parts communicate with each other. SOLUTION: The substrate storing container includes a container body 1 having an opening at one end and storing a substrate, and a lid body closing the opening, and is provided with one or more communication parts 3 making the inside and outside parts of the container body 1 communicate with each other. In the substrate storing container, a filter holding member 5 is mounted in the communication part 3, and a first filter 6 and a second filter 7 are arranged to face each other at both facing ends of an opening of the filter holding member 5. It is preferable that an opening/closing valve having a check valve is incorporated in the filter holding member, the pressure loss of the first filter 6 is not smaller than that of the second filter 7 arranged at the other end of the filter holding member, and the like. COPYRIGHT: (C)2009,JPO&INPIT |
