| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a microscopic measurement apparatus capable of measuring sequentially a plurality of selected areas, irrespective of a stage driving system and driving precision thereof. <P>SOLUTION: This microscopic measurement apparatus 10 of acquiring optical information of a desired portion, by moving a measuring optical axis on a sample surface, is provided with an observation image display means 44 for displaying a sample surface image as an observation image, within a visual field observable at a current sample position, an optical axis display means 46 for displaying a current position 66 of the measuring optical axis, and a planned measuring area 68, in an overlapped state with the observation image, an area setting means 48 capable of setting the measuring area by expanding, contracting, deforming and moving the planned measuring area, and an optical information acquiring means 52 for measuring one or the plurality of set measuring areas sequentially, based on a measurement start instruction. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
