| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for efficiently manufacturing a magnetic recording medium by filling concave portions of a concavo-convex patterned recording layer with a filler to provide sufficient surface flatness. SOLUTION: A cladding 42 is etched by a dry etching method in which an etch rate of the cladding 42 is equal to or higher than an etch rate of the filler 36. Then, by dry etching method in which an etch rate of the filler 36 is higher than that of the cladding 42, the filler 36 is etched so that a top surface of a diaphragm 21 over a recording element 20A (or a top surface of the recording element 20A in absence of the diaphragm 21) is exposed, and the cladding 42 remains over the concave portion 34 of the concavo-convex pattern of the recording layer 20. COPYRIGHT: (C)2009,JPO&INPIT
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