| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern projection device, making an illuminating area in the shape of a phosphor on the whole, projecting a measurement pattern with an enough quantity of light efficiently, and performing accurate observation. SOLUTION: This pattern projection device includes: phosphors 9, 9a, 9b, 9c; a laser light source 20 for irradiating a laser beam to the phosphors 9, 9a, 9b, 9c; and an optical system for taking a laser beam 20 as excitation light and imaging light emitted by the phosphors on an object to be detected, wherein the shapes of the phosphors 9, 9a, 9b, 9c are projected on the object to be detected by the optical system. COPYRIGHT: (C)2009,JPO&INPIT
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