PROCESS FOR CHARGING LIQUEFIED AMMONIA, PROCESS FOR PRODUCTION OF NITRIDE CRYSTAL, AND REACTOR FOR GROWTH OF NITRIDE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a process for charging liquefied ammonia which can efficiently cool a vessel, and can charge high purity ammonia at a high precision. SOLUTION: The process for charging liquefied ammonia comprises conducting successively: the feeding step of feeding gaseous ammonia to a condenser 2, the liquefaction step of liquefying the gaseous ammonia in the condenser 2, the cooling step of feeding ammonia liquefied in the condenser 2 to the container 3 to cool the container 3 with the latent heat due to vaporization of the liquefied ammonia, the cycling step of feeding gaseous ammonia formed by the vaporization of liquefied ammonia in the cooling step to the condenser 2, and the charging step of feeding the ammonia liquefied in the condenser 2 to the container 3 to charge the container 3 with liquefied ammonia. COPYRIGHT: (C)2009,JPO&INPIT