| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the aeration of a vacuum pump by considering the process where the vacuum pump is used. <P>SOLUTION: Provided are a device including vacuum pump and an associated aeration method, in which one of a plurality of aeration parameters is selected so as to adapt the aeration to the process. The device includes an aeration parameter memory and a parameter selecting means. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
