COATING COMPOSITION USED WITH OVERCOATED PHOTORESIST

摘要

PROBLEM TO BE SOLVED: To provide anti-reflective coating compositions useful for being used with an overcoated photoresist layer to manufacture integrated circuits.

SOLUTION: In a first aspect, organic coating compositions are provided, particularly spin-on anti-reflective coating compositions that contain a polyester resin component. In a further aspect, the coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound.

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