| 摘要 |
PROBLEM TO BE SOLVED: To carry out a peel test, without requiring labors or times for preparing a sample. SOLUTION: An end part Sd of a sample surface layer which remains between cut and removed portions is rolled up by a cutting blade 5, after cutting and removing the sample surface layer in parallel with a prescribed space; the end part Sd is fixed, under the condition where the end part Sd is sandwiched among a support member 51, a block part 51a and a pressing member 52, and a moving head 4 is relatively moved at an x-direction relative velocity Vx and a z-direction relative velocity Vz; and a horizontal force Fh and a vertical force Fv are collected, while peeling a surface layer Sa of the sample S at a peeling angleθ. As a result, since there is no need to have the sample with a prescribed width at the initial stage, peel test is thereby carried out, without requiring the labors or the times for preparing the sample. The peel test with a minute width (for example, 100μm) for the sample width is readily carried ou, in the peel test. COPYRIGHT: (C)2009,JPO&INPIT
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