| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve reliability by suppressing vibration due to air flow of a heat generation plate, for example, while uniformizing temperature distribution. <P>SOLUTION: A tension spring 53 is energized to pull a holding body attaching plate 64 upward, a movable holding body 61 is pulled upward, and a bent part 37 of a metallic heater 28 is pulled toward the outside of the metallic heater 28. When the metallic heater 28 is extended by thermal expansion in heating, the bent part 37 together with the movable holding body 61 moves outward along the length direction of respective heat generation regions 36b of the metallic heater 28, thereby preventing curving (deflection) of the metallic heater 28, and preventing vibration of the metallic heater 28 due to the flow of air. <P>COPYRIGHT: (C)2009,JPO&INPIT |
