| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device capable of miniaturizing itself by reducing a footprint. SOLUTION: By using Y-axis shafts 3A, 3B having a magnet inside and Y-axis moving members 9A, 9B made of a coil surrounding the Y-axis shafts 3A, 3B as a Y-axis drive section 3 for moving a Y-axis mobile unit 4, a drive section is reduced as compared with a linear motor. As a result, by arranging a side 4b that opposes a sliding surface 2d at the side at a lower portion of one Y-axis moving member 9A, the footprint occupied by the side 4b is omitted when it is side by side with the Y-axis drive section 3A. COPYRIGHT: (C)2009,JPO&INPIT
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