摘要 |
PROBLEM TO BE SOLVED: To obtain a magnetic sensor of uniform quality by preventing a magnetic film having magneto-resistance effect from being broken and improving hysteresis characteristics. SOLUTION: On a substrate 11, a plurality of lead films 12a-6 and 12a-7 are formed and on those lead films, a plurality of magnetic films 12a-2 connecting the lead films to each other in series are formed to be laminated on the lead films at both ends thereof; and side spacers 21 made of conductive materials filling corner portions between side surfaces of the lead films and the top surface of the substrate are provided at peripheral edges of the lead films where the magnetic films are laminated, and the magnetic films are formed on the side spacers and lead films. COPYRIGHT: (C)2009,JPO&INPIT
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