发明名称 NANOINDENTATION SURFACE ANALYSIS METHOD
摘要 The present invention provides a novel method for determining the mechanical properties of the surfaces of materials including thin films. Generally, the method is comprised of laterally scanning the surface of the film with an array of cantilever tips varying temperature, load and time to obtain a measurement of mechanical properties, such as hardness and glass transition temperature. The method can be used to obtain mechanical properties of films that would otherwise be unobtainable using standard methods.
申请公布号 US2009120172(A1) 申请公布日期 2009.05.14
申请号 US20080251136 申请日期 2008.10.14
申请人 IBM CORPORATION 发明人 BRADSHAW RICHARD L.;DUERIG URS T.;GOTSMANN BERND W.
分类号 G01N3/44 主分类号 G01N3/44
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