| 摘要 |
PROBLEM TO BE SOLVED: To improve recovery efficiency of a polishing material by suppressing roughness of a water surface upon jet splashdown while making the size of a catch tank compact without particularly changing the size. SOLUTION: The catch tank 4 receiving the water jet J jetted under high pressure consists of a water tank 40 with a shock-absorbing means 401, and a water draining tank 41 juxtaposed to the water tank 40 for draining supernatant water after entering of machining water from the water tank 40 and precipitating of the polishing material K. Inside the water tank 40, a wave deadening means 402 surrounding the shock-absorbing means 401 with a part thereof protruded from a water surface is provided. The sidewall 403 of the water tank 40 around the wave deadening means 402 is inclined by an angle expanding outward. When the water jet J splashes down in the water tank 40, the roughness of the water surface is suppressed by the action of the shock-absorbing means 401, wave deadening means 402, and the sidewall 403 around the wave deadening means 402 to facilitate precipitation of the polishing material K in the bottom of the water tank 40. On the side of the water draining tank 41, the supernatant water hardly including the polishing material is allowed to be drained. COPYRIGHT: (C)2009,JPO&INPIT
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