发明名称 METHODS AND SYSTEMS FOR SEMICONDUCTOR TESTING USING REFERENCE DICE
摘要 Methods and systems of semiconductor testing where reference dice and non-reference dice in a wafer and/or lot are tested differently. In one embodiment of the invention, geography, lithography exposure, other characteristics, performance and/or behavior are taken into account when selecting reference dice, thereby improving the likelihood that the response of reference dice to testing is well representative of the wafer and/or lot. In one embodiment, based on data from the testing of reference dice, the test flow for non-reference dice and/or other testing may or may not be adjusted.
申请公布号 WO2008004209(A4) 申请公布日期 2009.05.14
申请号 WO2007IL00758 申请日期 2007.06.21
申请人 OPTIMALTEST LTD.;BALOG, GIL 发明人 BALOG, GIL
分类号 G01R31/26 主分类号 G01R31/26
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