| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state imaging apparatus that prevents noise from being generated by a floating diffusion layer while preventing a decrease in sensitivity, and to provide a manufacturing method thereof. SOLUTION: The floating diffusion layer 103b is formed in an N-type silicon layer 103 of the solid-state imaging apparatus. On a flattening film 104, four columnar supports 106 made of dielectric materials are stood surrounding the floating diffusion layer 103b in plan view, and support a light shield film 107. The light shield film 107 prevents external light from being incident on the floating diffusion layer 103b. A hollow is formed between the light shield film 107 and floating diffusion layer 103b to suppress generation of floating capacitance. COPYRIGHT: (C)2009,JPO&INPIT
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