发明名称 SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME
摘要 A technique which improves the reliability in coupling between a bump electrode of a semiconductor chip and wiring of a mounting substrate, more particularly a technique which guarantees the flatness of a bump electrode even when wiring lies in a top wiring layer under the bump electrode, thereby improving the reliability in coupling between the bump electrode and the wiring formed on a glass substrate. Wiring, comprised of a power line or signal line, and a dummy pattern are formed in a top wiring layer beneath a non-overlap region of a bump electrode. The dummy pattern is located to fill the space between wirings to reduce irregularities caused by the wirings and space in the top wiring layer. A surface protection film formed to cover the top wiring layer is flattened by CMP.
申请公布号 US2009121349(A1) 申请公布日期 2009.05.14
申请号 US20080239810 申请日期 2008.09.28
申请人 RENESAS TECHNOLOGY CORP. 发明人 SUZUKI SHINYA
分类号 H01L23/52;H01L21/44 主分类号 H01L23/52
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