| 摘要 |
<p>This invention relates to an illumination optical apparatus capable of forming a pupil intensity distribution of a desired shape and desired illuminance and, in turn, capable of realizing illumination conditions of great variety. The illumination optical apparatus has a spatial light modulation unit (2,3) composed of a first spatial light modulator (2) and a second spatial light modulator (3) arranged in an order of incidence of light, and a distribution forming optical system (5,7) to form a predetermined light intensity distribution on an illumination pupil, based on a beam having traveled via the first spatial light modulator (2) and the second spatial light modulator (3). The first spatial light modulator (2) has a plurality of first optical elements (2a) which are two-dimensionally arranged and postures of which each are individually controlled. The second spatial light modulator has a plurality of second optical elements which are two-dimensionally arranged in correspondence to the first optical elements and postures of which each are individually controlled.</p> |
