发明名称 Vertical carousel and vertical transportation method using the vertical carousel
摘要 An inner wall surrounding an inner space for vertically circulating a rack, and an outer wall surrounding the inner wall are provided. Then, a rack is disposed in the inner space. A pair of extensions are provided at diagonal positions of the rack. The extensions are attached to an endless drive member in a manner that the extensions protrude toward an outer space between the inner wall and the outer wall through slits of the inner wall, and, a drive mechanism for a drive member is provided in the outer space. Further, a tunnel passing through the outer space to connect the inner space and an area outside of the vertical carousel is provided for transportation of an article into, and out of the tunnel.
申请公布号 EP2058852(A2) 申请公布日期 2009.05.13
申请号 EP20080018587 申请日期 2008.10.23
申请人 MURATA MACHINERY, LTD. 发明人 SUZUKI, TOHRU;IZUMI, TAKANORI
分类号 H01L21/677 主分类号 H01L21/677
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