| 摘要 |
<p>A diaphragm for a pressure sensor includes a central portion having a primary thickness (30) and a surrounding portion having a secondary thickness (38) greater than the primary thickness (30). The pressure sensor includes the diaphragm, a fluid conduit capped by the diaphragm, and a piezoelectric bridge for each of the primary and secondary portions to generate a signal indicative of the displacement of the portions; and a method of producing the sensor.</p> |
