| 摘要 |
<p>A scanner head is provided for processing a workpiece by means of a focused laser beam. The scanner head includes a first module, rotatably supported in a first direction in order to deflect the laser beam from the first direction into a second direction, preferably perpendicular to the first direction, and a second module, which is fixed to the first module and is rotatably supported in the second direction, and which has a scanner mirror capable of tilting about a first axis. An adaptive beam deflection unit, which may include an adaptive mirror, is provided in the first module. The scanner mirror is arranged in the second module so that it can rotate or tilt about a second axis, and an optical arrangement with a beam expansion element and a focusing element is arranged in the scanner head.</p> |
