PRESSURE MEASURING SENSOR

摘要

A dry, front-flush, pressure measuring transducer, which enables reliable measurements over a large temperature range. The transducer includes: a process connection made of a stainless steel and serving for securing the pressure measuring transducer to a measuring site; and a pressure sensor module, including a holder of stainless steel, into which a metal separating diaphragm is set front-flushly by means of a purely metal connection. A pressure to be measured acts on the separating diaphragm during measurement operation. The holder is set front-flushly by means of a purely metal connection into the process connection. The pressure sensor module further includes a titanium disk which is carried by the holder. A sapphire carrier with integrated silicon sensors is secured to the titanium disk. The titanium disk forms the separating diaphragm or it is physically connected with the separating diaphragm in such a manner that a deflection of the separating diaphragm effects a corresponding deflection of the titanium disk.