| 摘要 |
A plasma processing apparatus for powder, and a plasma processing method of powder, in which a powder supply nozzle (15) is provided to supply a powder material into plasma flame generated inside a high-frequency coil (12), the powder supply nozzle (15) arranged substantially radially centrally of the high-frequency coil (12) comprises a revolving flow forming device, for example, a spiral-shaped plate (1), to cause a carrier gas and the powder material to form therein a revolving flow with an axis thereof directed axially of the high-frequency coil, and the revolving flow is discharged from an outlet (4) at an end of the nozzle. More preferably, a transition space (3) is provided between the outlet at the end of the nozzle and the revolving flow forming device, and the outlet (4) at the end of the nozzle is made small in diameter.
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