| 摘要 |
A method for forming a storage node contact in a semiconductor device using a nitride-based hard mask is provided. The method includes: forming an inter-layer oxide layer on a substrate; forming a hard mask containing a nitride material on the inter-layer oxide layer; forming a mask pattern on the hard mask; etching the hard mask; etching the inter-layer oxide layer to form storage node contact holes; removing the hard mask; forming storage node contact spacers on lateral walls of the storage node contact holes; and forming storage node contact plugs filling the storage node contact holes.
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